„Development of the technology to obtain nanofilms from transition metal oxides to create nanodevices“

Author: bakar duadze
Keywords: Supercapacitor, Hafnium, Zirconium, Yttrium.
Annotation:

The following thesis discusses the technological processes of obtaining and researching the oxides of transition metals of hafnium, zirconium and yttrium and develops a technological route for the formation of supercapacitor structures based on them. The layer sequence and technological processes for the formation of each layer in the supercapacitor three-layer structure were specified. Structures composed of triple oxides were obtained by their magnetron scattering in oxygen and argon atmosphere at various partial pressures. To study the electrical and structural properties of individual oxide films, each oxide layer was obtained separately in the same technological mode. The study addresses various key tasks such as obtaining an active layer under different technological conditions of magnetron scattering, recording the X-ray spectra required for structural analysis to obtain a supercapacitor structure, measuring voltage-capacitance (C-V) and voltage-current (I-V) characteristics. The obtained structures were tested on an in-action stand, which was designed to determine the direction of current when different polarity voltages were applied to the structure between the substrate and the electrode. The results of the relevant measurements were summarized and conclusions were made.